4. Metal working
  5. Barrier layer or semiconductor device making

Kouji Tometsuka

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Hydrogen annealing process and apparatus therefor

Metal treatment – Process of modifying or maintaining internal physical... – Heating or cooling of solid metal
Reexamination Certificate

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Semiconductor fabricating apparatus, method for modifying...

Material or article handling – Chamber of a type utilized for a heating function and... – Charging of chamber
Reexamination Certificate

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Substrate processing apparatus

Material or article handling – Chamber of a type utilized for a heating function and... – Charging of chamber
Reexamination Certificate

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Substrate processing apparatus and maintenance method therefor

Metal working – Barrier layer or semiconductor device making
Patent

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Substrate processing apparatus and maintenance method therefor

Metal working – Barrier layer or semiconductor device making
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1585564

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