4. Coating apparatus
  5. Gas or vapor deposition
  6. Crucible or evaporator structure

Kouji Kise

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Exposing method and semiconductor device fabricated by the...

X-ray or gamma ray systems or devices – Specific application – Lithography
Reexamination Certificate

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Thin film forming apparatus using laser

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Patent

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X-ray mask

X-ray or gamma ray systems or devices – Specific application – Lithography
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1338960

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