4. Data processing: generic control systems or specific application
  5. Generic control system, apparatus or process
  6. Optimization or adaptive control

Konstantin Y. Smekalin

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Methods and apparatus for polishing control

Data processing: generic control systems or specific application – Generic control system – apparatus or process – Optimization or adaptive control
Reexamination Certificate

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Methods and apparatus for polishing control

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate

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Methods and apparatus for polishing control

Data processing: generic control systems or specific application – Generic control system – apparatus or process – Optimization or adaptive control
Reexamination Certificate

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