4. Active solid-state devices (e.g., transistors, solid-state diode
  5. Combined with electrical contact or lead
  6. Of specified material other than unalloyed aluminum

Koji Urabe

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Apparatus and method for manufacturing semiconductor device

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Fabrication process of semiconductor device with titanium film

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Manufacturing method for contact hole

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Metal plug electrode in semiconductor device and method for form

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
Patent

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Method for forming metal plug electrode in semiconductor device

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Patent

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Profile ID: LFUS-PAI-P-1027224

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