4. Material or article handling
  5. Chamber of a type utilized for a heating function and...
  6. Charging of chamber

Koji Tometsuka

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Wafer transfer mechanism in vertical CVD diffusion apparatus

Material or article handling – Chamber of a type utilized for a heating function and... – Charging of chamber
Patent

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Wafer transfer method in vertical CVD diffusion apparatus

Coating processes – Measuring – testing – or indicating
Patent

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Profile ID: LFUS-PAI-P-1751176

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