Wafer transfer mechanism in vertical CVD diffusion apparatus

Details Wafer transfer mechanism in vertical CVD diffusion apparatus Wafer transfer mechanism in vertical CVD diffusion apparatus

1992-04-23

1993-06-08

Huppert, Michael S.

Material or article handling

Chamber of a type utilized for a heating function and...

Charging of chamber

414331, 414416, 414DIG3, 414DIG6, 414DIG7, 901 40, B65G 100

Patent

active

052173402

ABSTRACT:
A wafer transfer method and mechanism in a vertical CVD diffusion apparatus and a control device for the method and mechanism. The vertical-type CVD diffusion apparatus has a boat containing many wafers in a horizontal orientation, stacked vertically. Product wafers are transferred to the boat five by five, dummy wafers are transferred five by five or a fraction less than five, and monitor wafers are inserted one by one between a block of the product wafers and another block of the product wafers, or a block of the dummy wafers.

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