Wafer transfer method in vertical CVD diffusion apparatus

Details Wafer transfer method in vertical CVD diffusion apparatus Wafer transfer method in vertical CVD diffusion apparatus

1990-01-18

1992-05-12

Bueker, Richard

Coating processes

Measuring, testing, or indicating

4272481, 437 8, 118715, 118729, C23C 1600

Patent

active

051126419

ABSTRACT:
A wafer transfer method and mechanism in a vertical CVD diffusion apparatus and a control device for the method and mechanism. The vertical-type CVD diffusing apparatus has a boat containing many wafers in a horizontal orientation, stacked vertically. Product wafers are transferred to the boat five by five, dummy wafers are transferred five by five or a fraction less than five, and monitor wafers are inserted one by one between a block of the product wafers and another block of the product wafers, or a block of the dummy wafers.

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English translation of Japanese Patent Application No. 62-130524.

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