4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Koji Teranishi

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Antireflection film and optical element having the same

Optical: systems and elements – Having significant infrared or ultraviolet property – Multilayer filter or multilayer reflector
Reexamination Certificate

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Antireflection film and optical element having the same

Optical: systems and elements – Having significant infrared or ultraviolet property – Multilayer filter or multilayer reflector
Reexamination Certificate

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High-frequency introducing means, plasma treatment apparatus, an

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Multilayer film reflector for soft X-rays and manufacturing...

Optical: systems and elements – Having significant infrared or ultraviolet property – Multilayer filter or multilayer reflector
Reexamination Certificate

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Multilayer film reflector for soft X-rays and manufacturing...

Optical: systems and elements – Having significant infrared or ultraviolet property – Multilayer filter or multilayer reflector
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1631742

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