Inspection tool

Details Inspection tool Inspection tool

2006-09-12

2006-09-12

Nguyen, Tu T. (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

Reexamination Certificate

active

07106434

ABSTRACT:
An integrated inspection system adapted to inspect a substrate. A first inspection station performs a first inspection of the substrate at a first resolution, and identifies defect candidate sites. A controller determines position information associated with each of the identified defect candidate sites. A second inspection station performs a second inspection of the defect candidate sites at a second resolution, where the second resolution is higher than the first resolution. A substrate stage moves the substrate between the first inspection station and the second inspection station, and indexes the substrate under both the first inspection station and the second inspection station.

REFERENCES:
patent: 6038029 (2000-03-01), Finarov
patent: 6208751 (2001-03-01), Almogy
patent: 6674510 (2004-01-01), Jasper et al.
patent: WO 01/80289 (2001-10-01), None
patent: WO 02/25708 (2002-03-01), None
patent: WO 02/29385 (2002-04-01), None
patent: WO 02/088677 (2002-11-01), None

Affiliated with

Also associated with

Rating

Inspection tool does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Inspection tool, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Inspection tool will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3545400