4. Thermal measuring and testing
  5. Temperature measurement
  6. Composite temperature-related paramenter

Kiyoyuki Muramatsu

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Multi-wavelength projection exposure and alignment apparatus

Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
Patent

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Projection optical apparatus

Thermal measuring and testing – Temperature measurement – Composite temperature-related paramenter
Patent

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Projection type exposure apparatus

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Patent

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Profile ID: LFUS-PAI-P-1747766

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