Projection optical apparatus

Details Projection optical apparatus Projection optical apparatus

1985-01-29

1988-03-15

Corbin, John K.

Thermal measuring and testing

Temperature measurement

Composite temperature-related paramenter

350409, 350418, 374132, 355 55, G02B 702, G02B 2752, G01J 500

Patent

active

047309008

ABSTRACT:
A projection optical apparatus comprises illuminating means providing for an illuminating light beam, a projection optical system including optical elements disposed across the illuminating light beam and having an imaging plane, and detecting mean including temperature sensor means provided on at least one of the optical elements and producing an output corresponding to the temperature of the one optical element.

REFERENCES:
patent: 2189122 (1940-02-01), Andrews
patent: 3109097 (1963-10-01), De Waard et al.
patent: 3368078 (1968-02-01), Flint et al.
patent: 3498695 (1970-03-01), Brouwer
patent: 4238157 (1980-12-01), Stranch et al.
patent: 4331388 (1982-05-01), McCrobie et al.
patent: 4433923 (1984-02-01), Rascati et al.
patent: 4556327 (1985-12-01), Kalil et al.

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