4. Coating apparatus
  5. Gas or vapor deposition
  6. Multizone chamber

Kenneth Doering

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Multipurpose processing chamber for chemical vapor deposition pr

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Processing chamber for atomic layer deposition processes

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Processing chamber for atomic layer deposition processes

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Processing chamber for atomic layer deposition processes

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1051860

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