4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Application of energy to the gaseous etchant or to the...

Kenneth Collins

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Aircraft deicing apparatus

Aeronautics and astronautics – Aircraft structure – Ice prevention
Patent

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Center gas feed apparatus for a high density plasma reactor

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
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High pressure high non-reactive diluent gas content high...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Reexamination Certificate

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Inductively coupled RF plasma reactor having an overhead solenoi

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent

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Inductively coupled RF Plasma reactor having an overhead...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Reexamination Certificate

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