4. Radiant energy
  5. Inspection of solids or liquids by charged particles
  6. Analyte supports

Kenji Ohtoshi

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Charged beam apparatus having cleaning function and method of cl

Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Patent

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Charged beam applying apparatus

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent

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Method of acquiring offset deflection amount for shaped beam...

Radiant energy – With charged particle beam deflection or focussing – With detector
Reexamination Certificate

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Profile ID: LFUS-PAI-P-932268

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