4. Semiconductor device manufacturing: process
  5. Making device or circuit emissive of nonelectrical signal
  6. Mesa formation

Keith Doran Weeks

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Heteroepitaxial deposition over an oxidized surface

Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal – Mesa formation
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Methods of making substitutionally carbon-doped crystalline...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Forming from vapor or gaseous state – With decomposition of a precursor
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Selective deposition of silicon-containing films

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate
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