4. Stock material or miscellaneous articles
  5. Composite
  6. Of inorganic material

Keiji Morita

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Ceramics material and producing the same

Stock material or miscellaneous articles – Composite – Of inorganic material
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High-purity crystalline inorganic fiber, molded body...

Compositions: ceramic – Ceramic compositions – Refractory
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Plasma-resistant member and plasma treatment apparatus using...

Coating apparatus – Gas or vapor deposition – With treating means
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Plasma-resistant member for semiconductor manufacturing...

Compositions: ceramic – Ceramic compositions – Yttrium – lanthanide – actinide – or transactinide containing
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Profile ID: LFUS-PAI-P-2528835

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