4. Coating apparatus
  5. Gas or vapor deposition
  6. Multizone chamber

Ke Ling Lee

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Chamber isolation valve RF grounding

Fluid handling – With indicator – register – recorder – alarm or inspection means – Position or extent of motion indicator
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Horizontal sputtering system

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Methods and apparatus for sealing an opening of a processing...

Valves and valve actuation – With means to increase head and seat contact pressure – Gate valve
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System and method for handling and masking a substrate in a...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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System and method for transporting and sputter coating a...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Profile ID: LFUS-PAI-P-790143

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