Chamber isolation valve RF grounding

Details Chamber isolation valve RF grounding Chamber isolation valve RF grounding

2005-07-01

2008-12-30

Bastianelli, John (Department: 3753)

Fluid handling

With indicator, register, recorder, alarm or inspection means

Position or extent of motion indicator

C251S193000, C277S919000, C277S920000

Reexamination Certificate

active

07469715

ABSTRACT:
A method and apparatus for grounding a chamber isolation valve are provided. Generally, the method makes use of an electrically conductive elastomeric member or members to effectively ground a chamber isolation valve and/or isolation valve door while avoiding metal-to-metal contact between moving parts in the processing system. In one embodiment, the elastomeric member is attached to and in electrical communication with the door of the chamber isolation valve. The elastomeric member is brought into contact with a grounded component of the plasma processing system when the door is in the closed position. In another embodiment, the conductive elastomeric member is attached to a bracing member of the isolation valve and is brought into contact with a grounded component of the plasma processing system when the bracing member is deployed to hold the isolation valve door in place during substrate processing. Other configurations are also provided.

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PCT Search Report EP 06 00 2688, Oct. 31, 2006.

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