4. Semiconductor device manufacturing: process
  5. Having diamond semiconductor component

Kazutoshi Murata

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Large-diameter SiC wafer and manufacturing method thereof

Single-crystal – oriented-crystal – and epitaxy growth processes; – Forming from vapor or gaseous state – With decomposition of a precursor
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Production method of α-SiC wafer

Semiconductor device manufacturing: process – Having diamond semiconductor component
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Production method of SiC monitor wafer

Semiconductor device manufacturing: process – Having diamond semiconductor component
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Profile ID: LFUS-PAI-P-2904645

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