4. Brakes
  5. Wheel
  6. Axially movable brake element or housing therefor

Kazuo Maeda

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Apparatus for forming a film on a wafer

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Apparatus for forming film

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Apparatus for manufacturing semiconductor device

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Apparatus for manufacturing semiconductor device

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Apparatus for manufacturing semiconductor device and method for

Coating apparatus – Gas or vapor deposition
Patent

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