4. Electricity: electrical systems and devices
  5. Electric charge generating or conducting means
  6. Use of forces of electric charge or field

Kazuhiko Urano

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Ceramic electrostatic chuck with built-in heater

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Silicon oxide depositing source and coated film

Stock material or miscellaneous articles – Composite – Of silicon containing
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Profile ID: LFUS-PAI-P-1343462

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