Exposure apparatus and method for producing device

Details Exposure apparatus and method for producing device Exposure apparatus and method for producing device

2011-08-09

2011-08-09

Nguyen, Hung Henry (Department: 2882)

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

C355S053000

Reexamination Certificate

active

07995187

ABSTRACT:
A lithographic apparatus includes a substrate table which holds a substrate, a projection system which projects a patterned beam of radiation onto the substrate, the projection system having a final optical element adjacent the substrate, a liquid supply system which provides a liquid to a space between the projection system and the substrate table, and a cleaning system which cleans the substrate table.

REFERENCES:
patent: 3139101 (1964-06-01), Wyczalek et al.
patent: 3648587 (1972-03-01), Stevens
patent: 4346164 (1982-08-01), Tabarelli et al.
patent: 4465368 (1984-08-01), Matsuura et al.
patent: 4480910 (1984-11-01), Takanashi et al.
patent: 4509852 (1985-04-01), Tabarelli et al.
patent: 4780747 (1988-10-01), Suzuki et al.
patent: RE32795 (1988-12-01), Matsuura et al.
patent: 4825453 (1989-04-01), Kembo et al.
patent: 5368649 (1994-11-01), Tsukazaki
patent: 5493403 (1996-02-01), Nishi
patent: 5528118 (1996-06-01), Lee
patent: 5610683 (1997-03-01), Takahashi
patent: 5623853 (1997-04-01), Novak et al.
patent: 5646413 (1997-07-01), Nishi
patent: 5657129 (1997-08-01), Nishi
patent: 5715039 (1998-02-01), Fukuda et al.
patent: 5744924 (1998-04-01), Lee
patent: 5774575 (1998-06-01), Tanaka et al.
patent: 5815246 (1998-09-01), Sperling et al.
patent: 5825043 (1998-10-01), Suwa
patent: 5844247 (1998-12-01), Nishi
patent: 5874820 (1999-02-01), Lee
patent: 5942871 (1999-08-01), Lee
patent: 5969441 (1999-10-01), Loopstra et al.
patent: 5980647 (1999-11-01), Buker et al.
patent: 5982128 (1999-11-01), Lee
patent: 5995234 (1999-11-01), Nishi
patent: 6008500 (1999-12-01), Lee
patent: 6020710 (2000-02-01), Lee
patent: 6033478 (2000-03-01), Kholodenko
patent: 6049186 (2000-04-01), Lee
patent: 6051843 (2000-04-01), Nishi
patent: 6087797 (2000-07-01), Lee
patent: 6150787 (2000-11-01), Lee
patent: 6151105 (2000-11-01), Lee
patent: 6175404 (2001-01-01), Lee
patent: 6178974 (2001-01-01), Kobayashi et al.
patent: 6188195 (2001-02-01), Lee
patent: 6191429 (2001-02-01), Suwa
patent: 6195154 (2001-02-01), Imai
patent: 6208407 (2001-03-01), Loopstra
patent: 6246202 (2001-06-01), Lee
patent: 6262796 (2001-07-01), Loopstra et al.
patent: 6268904 (2001-07-01), Mori et al.
patent: 6271640 (2001-08-01), Lee
patent: 6279881 (2001-08-01), Nishi
patent: 6281654 (2001-08-01), Lee
patent: 6307620 (2001-10-01), Takabayashi et al.
patent: 6316901 (2001-11-01), Lee
patent: 6327025 (2001-12-01), Imai
patent: 6341007 (2002-01-01), Nishi et al.
patent: 6400441 (2002-06-01), Nishi et al.
patent: 6459472 (2002-10-01), De Jager et al.
patent: 6459672 (2002-10-01), Asoma
patent: 6466365 (2002-10-01), Maier et al.
patent: 6496257 (2002-12-01), Taniguchi et al.
patent: 6496259 (2002-12-01), Barish
patent: 6498352 (2002-12-01), Nishi
patent: 6549269 (2003-04-01), Nishi et al.
patent: 6590634 (2003-07-01), Nishi et al.
patent: 6683433 (2004-01-01), Lee
patent: 6747732 (2004-06-01), Lee
patent: 6778257 (2004-08-01), Bleeker et al.
patent: 6781670 (2004-08-01), Krautschik
patent: 6788477 (2004-09-01), Lin
patent: 6798491 (2004-09-01), Nishi et al.
patent: 6841965 (2005-01-01), Lee
patent: 6844206 (2005-01-01), Phan et al.
patent: 6853794 (2005-02-01), Lu et al.
patent: 6878916 (2005-04-01), Schuster
patent: 6891596 (2005-05-01), Rostalski et al.
patent: 6891683 (2005-05-01), Schuster
patent: 6914665 (2005-07-01), Ishikawa
patent: 6927840 (2005-08-01), Lee
patent: 6989647 (2006-01-01), Lee
patent: 7029832 (2006-04-01), Rolland et al.
patent: 7061573 (2006-06-01), Tsukamoto
patent: 7061575 (2006-06-01), Taniguchi et al.
patent: 7070915 (2006-07-01), Ho et al.
patent: 7075616 (2006-07-01), Derksen et al.
patent: 7092069 (2006-08-01), Komine
patent: 7145641 (2006-12-01), Kroon et al.
patent: 7145671 (2006-12-01), Phillips et al.
patent: 7154676 (2006-12-01), Schuster
patent: 7177008 (2007-02-01), Nishi et al.
patent: 7190527 (2007-03-01), Rostalski et al.
patent: 7199858 (2007-04-01), Lof et al.
patent: 7203008 (2007-04-01), Schuster
patent: 7224427 (2007-05-01), Chang et al.
patent: 7256869 (2007-08-01), Nishi
patent: 7262422 (2007-08-01), Subramanian et al.
patent: 7312847 (2007-12-01), Rostalski et al.
patent: 7317504 (2008-01-01), De Smit et al.
patent: RE40043 (2008-02-01), Kwan et al.
patent: 7339743 (2008-03-01), Schuster
patent: 7365513 (2008-04-01), Lee
patent: 7379158 (2008-05-01), Mizutani et al.
patent: 7382540 (2008-06-01), Rostalski et al.
patent: 7388649 (2008-06-01), Kobayuashi et al.
patent: 7433015 (2008-10-01), Mulkens et al.
patent: 7433019 (2008-10-01), Kiuchi et al.
patent: 7436486 (2008-10-01), Hirukawa
patent: 7436487 (2008-10-01), Mizutani et al.
patent: 7442908 (2008-10-01), Schuster
patent: 7446851 (2008-11-01), Hirukawa
patent: 7460207 (2008-12-01), Mizutani et al.
patent: 7483117 (2009-01-01), Hirukawa
patent: 7495840 (2009-02-01), Schuster
patent: 7505111 (2009-03-01), Hirukawa et al.
patent: 7522259 (2009-04-01), Hazelton et al.
patent: 7589820 (2009-09-01), Nei et al.
patent: 7589821 (2009-09-01), Hirukawa
patent: 7639343 (2009-12-01), Hirukawa
patent: 2001/0015021 (2001-08-01), Gommori et al.
patent: 2001/0019250 (2001-08-01), Lee
patent: 2001/0030522 (2001-10-01), Lee
patent: 2001/0043320 (2001-11-01), Kato et al.
patent: 2002/0017889 (2002-02-01), Lee
patent: 2002/0041377 (2002-04-01), Hagiwara et al.
patent: 2002/0061469 (2002-05-01), Tanaka
patent: 2002/0163629 (2002-11-01), Switkes et al.
patent: 2003/0011763 (2003-01-01), Taniguchi et al.
patent: 2003/0030916 (2003-02-01), Suenaga
patent: 2003/0066975 (2003-04-01), Okada
patent: 2003/0157538 (2003-08-01), Krull et al.
patent: 2003/0174408 (2003-09-01), Rostalski et al.
patent: 2004/0000627 (2004-01-01), Schuster
patent: 2004/0004757 (2004-01-01), Schuster
patent: 2004/0021061 (2004-02-01), Bijkerk
patent: 2004/0032575 (2004-02-01), Nishi et al.
patent: 2004/0041377 (2004-03-01), Kumakiri et al.
patent: 2004/0075895 (2004-04-01), Lin
patent: 2004/0090606 (2004-05-01), Ishikawa
patent: 2004/0095085 (2004-05-01), Lee
patent: 2004/0109237 (2004-06-01), Epple et al.
patent: 2004/0114117 (2004-06-01), Bleeker
patent: 2004/0118184 (2004-06-01), Violette
patent: 2004/0119954 (2004-06-01), Kawashima et al.
patent: 2004/0120051 (2004-06-01), Schuster
patent: 2004/0125351 (2004-07-01), Krautschik
patent: 2004/0136494 (2004-07-01), Lof et al.
patent: 2004/0160582 (2004-08-01), Lof et al.
patent: 2004/0165159 (2004-08-01), Lof et al.
patent: 2004/0169834 (2004-09-01), Richter et al.
patent: 2004/0169924 (2004-09-01), Flagello et al.
patent: 2004/0180294 (2004-09-01), Baba-Ali et al.
patent: 2004/0180299 (2004-09-01), Rolland et al.
patent: 2004/0207824 (2004-10-01), Lof et al.
patent: 2004/0211920 (2004-10-01), Derksen et al.
patent: 2004/0224265 (2004-11-01), Endo et al.
patent: 2004/0224525 (2004-11-01), Endo et al.
patent: 2004/0227923 (2004-11-01), Flagello et al.
patent: 2004/0233405 (2004-11-01), Kato et al.
patent: 2004/0233407 (2004-11-01), Nishi et al.
patent: 2004/0238005 (2004-12-01), Takayama
patent: 2004/0253547 (2004-12-01), Endo et al.
patent: 2004/0253548 (2004-12-01), Endo et al.
patent: 2004/0257544 (2004-12-01), Vogel et al.
patent: 2004/0259008 (2004-12-01), Endo et al.
patent: 2004/0259040 (2004-12-01), Endo et al.
patent: 2004/0263808 (2004-12-01), Sewell
patent: 2005/0002009 (2005-01-01), Lee
patent: 2005/0007569 (2005-01-01), Streefkerk et al.
patent: 2005/0018208 (2005-01-01), Levinson
patent: 2005/0024609 (2005-02-01), De Smit et al.
patent: 2005/0025108 (2005-02-01), Dillinger et al.
patent: 2005/0028314 (2005-02-01), Hickman et al.
patent: 2005/0030506 (2005-02-01), Schuster
patent: 2005/0036121 (2005-02-01), Hoogendam et al.
patent: 2005/0036183 (2005-02-01), Yeo et al.
patent: 2005/0036184 (2005-02-01), Yeo et al.
patent: 2005/0036213 (2005-02-01), Mann et al.
patent: 2005/0037269 (2005-02-01), Levinson
patent: 2005/0042554 (2005-02-01), Dierichs et al.
patent: 2005/0046934 (2005-03-01), Ho et al.
patent: 2005/0048223 (2005-03-01), Pawloski et al.
patent: 2005/0068639 (2005-03-01), Pierrat et al.
patent: 2005/0073670 (2005-04-01), Carroll
patent: 2005/0078286 (2005-04-01), Dierichs et al.
patent: 2005/0084794 (2005-04-01), Me

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