4. Semiconductor device manufacturing: process
  5. With measuring or testing

Kashmir S. Sahota

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Conductor abrasiveless chemical-mechanical polishing in...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Dielectric protected chemical-mechanical polishing in...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate

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Differential pressure chemical-mechanical polishing in...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate

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Efficient and economical method of planarization of multilevel m

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Patent

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High removal rate chemical-mechanical polishing

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Patent

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Profile ID: LFUS-PAI-P-150448

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