4. Chemistry: electrical and wave energy
  5. Processes and products
  6. Coating, forming or etching by sputtering

Karl Mautz

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Configuration and a method for reducing contamination with...

Coating apparatus – With heat exchange – drying – or non-coating gas or vapor... – To remove or spread applied coating by gas blast
Reexamination Certificate

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Continuously adjustable neutral density area filter

Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate

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Controlled isotropy reactive ion etcher for multi-stepped sloped

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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Lithography chuck having piezoelectric elements, and method

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate

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Manufacturing system method for processing a lithography...

Work holders – Holder mounted for movement – Relative to a station
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1163628

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