4. Optics: measuring and testing
  5. By alignment in lateral direction
  6. With light detector

Kaneyoshi Aramaki

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Method of manufacturing semiconductor wafers

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Wafer notch dimension measuring apparatus

Optics: measuring and testing – By alignment in lateral direction – With light detector
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Profile ID: LFUS-PAI-P-1701301

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