Alignment method

Details Alignment method Alignment method

1995-07-20

1997-12-30

Hantis, K.

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

G01B 1100

Patent

active

057036853

ABSTRACT:
An alignment method is provided for determining a mark position by using any of a first method for determining a mark position with one of photodiodes for colors which shows a maximal contrast between a mark area and a non-mark area, a second method for determining a mark position by detecting mark positions with photodiodes for colors and taking an average for these positions and a third method for determining a mark position by determining a ratio for determining that mark position, through the photodiodes for colors, by using different contrast levels between a mark area and a non-mark area and a CCD color area sensor.

REFERENCES:
patent: 3555172 (1971-01-01), Heinz
patent: 4669884 (1987-06-01), Bigelow et al.
patent: 4702606 (1987-10-01), Matsuura et al.
patent: 4744663 (1988-05-01), Hamashima et al.
patent: 5094539 (1992-03-01), Komoriya et al.
patent: 5120974 (1992-06-01), Muraki
patent: 5229617 (1993-07-01), Saitoh et al.
patent: 5438413 (1995-08-01), Mazor et al.

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