4. Measuring and testing
  5. Speed, velocity, or acceleration
  6. Acceleration determination utilizing inertial element

Jyrki Kiihamäki

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Method for forming a cavity structure on SOI substrate and...

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal
Reexamination Certificate

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Method for manufacturing micromechanical components

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2192978

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