Method for manufacturing micromechanical components

Details Method for manufacturing micromechanical components Method for manufacturing micromechanical components

2011-02-08

2011-02-08

Chapman, John E (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

C361S280000

Reexamination Certificate

active

07882741

ABSTRACT:
The present invention relates to a method for manufacturing an acceleration sensor. In the method, thin SOI-wafer structures are used, in which grooves are etched, the walls of which are oxidized. A thick layer of electrode material, covering all other material, is grown on top of the structures, after which the surface is ground and polished chemo-mechanically, thin release holes are etched in the structure, structural patterns are formed, and finally etching using a hydrofluoric acid solution is performed to release the structures intended to move and to open a capacitive gap.

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