4. Cleaning and liquid contact with solids
  5. Processes
  6. Including regeneration, purification, recovery or separation...

Jürgen Schweckendiek

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Device for accomodating substrates

Supports: racks – Special article – Platelike
Reexamination Certificate

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Method and system for cleaning semiconductor elements

Cleaning and liquid contact with solids – Processes – Including regeneration – purification – recovery or separation...
Reexamination Certificate

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Method and system for cleaning semiconductor elements

Cleaning and liquid contact with solids – Processes – Using sequentially applied treating agents
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2704756

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