Device for accomodating substrates

Details Device for accomodating substrates Device for accomodating substrates

2007-09-18

2007-09-18

Purol, Sarah (Department: 3634)

Supports: racks

Special article

Platelike

Reexamination Certificate

active

10493789

ABSTRACT:
The present invention is directed to a device for retaining substrates (S), such as wafers or silicon substrates for the production of photovoltaic elements. The device includes opposing walls (1) that are interconnected by at least two rod-like carrier elements (2, 3) that are provided with a retaining means (5) for retaining the substrates (S) in a vertical position oriented parallel to the walls (1). At least one rod-like counter carrier element (4) is also provided and interconnects the two walls (1). The counter carrier element (4) is positioned in relation to the carrier elements (2, 3) so that vertical movement of the substrates (S) relative to the walls (1) is limited and loading or unloading of the substrates (S) is possible at a slant in relation to the vertical direction (V).

REFERENCES:
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patent: 5534074 (1996-07-01), Koons
patent: D381344 (1997-07-01), Kosaku
patent: 5788304 (1998-08-01), Korn et al.
patent: 5944038 (1999-08-01), Horton et al.
patent: 6086127 (2000-07-01), Korn et al.
patent: 6237979 (2001-05-01), Korn et al.
patent: 6340090 (2002-01-01), Jahani et al.
patent: 6571964 (2003-06-01), Jacobson et al.
patent: 24 22 527 (1975-11-01), None
patent: 43 00 205 (1994-07-01), None
patent: 197 53 471 (1998-07-01), None
WO 96/05611 A, Support for Substrates, Publication Date: Feb. 22, 1996.

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