4. Radiant energy
  5. With charged particle beam deflection or focussing
  6. Magnetic lens

Jun Yashima

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Beam dose computing method and writing method and record...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making
Reexamination Certificate

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Charged particle beam writing method and apparatus

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
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Method for resizing pattern to be written by lithography...

Computer-aided design and analysis of circuits and semiconductor – Design of semiconductor mask or reticle
Reexamination Certificate

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Profile ID: LFUS-PAI-P-3211582

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