4. Rotary kinetic fluid motors or pumps
  5. Smooth runner surface for working fluid frictional contact

Jun Yamawaku

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Substrate processing method and substrate processing apparatus

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Turbo-molecular pump, substrate processing apparatus, and...

Rotary kinetic fluid motors or pumps – Smooth runner surface for working fluid frictional contact
Reexamination Certificate

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Profile ID: LFUS-PAI-P-3308012

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