4. Coating processes
  5. Coating by vapor, gas, or smoke

Ju-Cheol Shin

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Chemical vapor deposition method for depositing silicide and...

Coating processes – Coating by vapor – gas – or smoke
Reexamination Certificate

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Metal interconnection with low resistance in a semiconductor...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Method for forming a conductive film and a conductive...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Method for forming a polycide structure in a semiconductor...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Method of forming a contact in a semiconductor device

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Profile ID: LFUS-PAI-P-2612058

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