4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Jozef Brcka

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Apparatus and method for improving plasma distribution and...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Apparatus and methods for compensating plasma sheath...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Compact, distributed inductive element for large scale...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Control of ion angular distribution function at wafer surface

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
Reexamination Certificate

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Embedded multi-inductive large area plasma source

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With radio frequency antenna or inductive coil gas...
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Profile ID: LFUS-PAI-P-2046938

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