4. Etching a substrate: processes
  5. Gas phase and nongaseous phase etching on the same substrate

Joseph T. Kocis

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MEMS encapsulated structure and method of making same

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
Reexamination Certificate

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Method to fabricate SiGe HBTs with controlled current gain...

Semiconductor device manufacturing: process – Forming bipolar transistor by formation or alteration of... – Having heterojunction
Reexamination Certificate

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Method to fabricate SiGe HBTs with controlled current gain...

Semiconductor device manufacturing: process – Forming bipolar transistor by formation or alteration of...
Reexamination Certificate

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Micro electromechanical switch having self-aligned spacers

Electricity: electrothermally or thermally actuated switches – Electrothermally actuated switches – With bimetallic elements
Reexamination Certificate

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Micro electromechanical switch having self-aligned spacers

Electricity: magnetically operated switches – magnets – and electr – Electromagnetically actuated switches – Polarity-responsive
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2468508

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