Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
Inventor
active
Apparatus and system for controlling ion ribbon beam...
Bi mode ion implantation with non-parallel ion beams
Cathode assembly for indirectly heated cathode ion source
Control system for indirectly heated cathode ion source
Electron confinement inside magnet of ion implanter
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Profile ID: LFUS-PAI-P-1828452