4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Etching inorganic substrate

Joon-hyock Choi

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Method of reducing notching during reactive ion etching

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Vertical offset structure and method for fabricating the same

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal
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Profile ID: LFUS-PAI-P-2691815

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