4. Optics: measuring and testing
  5. With plural diverse test or art

Jong-Wook Suk

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Endpoint detecting apparatus in a plasma etching system

Optics: measuring and testing – With plural diverse test or art
Patent

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Semiconductor device having an active region whose width varies

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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Profile ID: LFUS-PAI-P-138203

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