4. Coating apparatus
  5. Control means responsive to a randomly occurring sensed...
  6. Condition of coated material

Jong-soo Kim

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Apparatus and method for depositing particles onto a wafer

Semiconductor device manufacturing: process – With measuring or testing
Patent

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Apparatus for depositing particles onto a wafer

Coating apparatus – Control means responsive to a randomly occurring sensed... – Condition of coated material
Patent

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Nozzle assembly for an injector

Plastic article or earthenware shaping or treating: apparatus – Female mold and charger to supply fluent stock under... – With means to heat or cool
Reexamination Certificate

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Photoresist suck-back device in manufacturing system for semicon

Fluid sprinkling – spraying – and diffusing – With cleaning means – drip collecting – waste disposal or soil... – Nozzle cleaner – flusher or drainer
Patent

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Ultra-precision machine tool

Turning – Lathe – With program control
Reexamination Certificate

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Profile ID: LFUS-PAI-P-116288

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