4. Etching a substrate: processes
  5. Masking of a substrate using material resistant to an etchant
  6. Mechanically forming pattern into a resist

Jong-hyurk Park

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Compound having thiol anchoring group, method of...

Organic compounds -- part of the class 532-570 series – Organic compounds – Azo
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Method of manufacturing Er-doped silicon nano-dot array and...

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mechanically forming pattern into a resist
Reexamination Certificate

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Method of manufacturing silicon nanowires using silicon...

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – Fluid growth from gaseous state combined with preceding...
Reexamination Certificate

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