4. Coating apparatus
  5. Gas or vapor deposition
  6. Work support

Jonathan Frankel

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Ceramic-coated heating assembly for high temperature processing

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Chamber liner for high temperature processing chamber

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Heater/lift assembly for high temperature processing chamber

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Lid assembly for high temperature processing chamber

Coating apparatus – Gas or vapor deposition
Patent

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Systems and methods for controlling the temperature of a vapor d

Coating processes – Measuring – testing – or indicating
Patent

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Profile ID: LFUS-PAI-P-805442

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