4. Coating processes
  5. Coating by vapor, gas, or smoke

Jonathan Chapple-Sokol

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Metallurgy for semiconductor devices

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
Reexamination Certificate

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Method for depositing a titanium or tantalum nitride or nitride

Coating processes – Coating by vapor – gas – or smoke
Patent

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Profile ID: LFUS-PAI-P-1565028

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