Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
Examiner
active
No affiliations
Compensation of space charge in a particle beam system
Conjugated ICP and ECR plasma sources for wide ribbon ion...
Electron beam writing method, fine pattern writing system,...
Fastening apparatus
High resolution excitation/isolation of ions in a low...
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Profile ID: LFUS-PAI-P-2074888