4. Radiation imagery chemistry: process, composition, or product th
  5. Including control feature responsive to a test or measurement

John L. Sturtevant

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Dual-layer deep ultraviolet photoresist process and structure

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Reexamination Certificate

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Dual-wavelength exposure for reduction of implant shadowing

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
Reexamination Certificate

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Dynamically coupled metrology and lithography

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
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Dynamically coupled metrology and lithography

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
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Method for controlling a line dimension arising in photolithogra

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Profile ID: LFUS-PAI-P-1732387

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