4. Semiconductor device manufacturing: process
  5. Formation of semiconductive active region on any substrate
  6. Amorphous semiconductor

John (Bon-Woong) Koo

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Method and apparatus for controlling beam current uniformity...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Particle beam assisted modification of thin film materials

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – Amorphous semiconductor
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2328535

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