4. Coating apparatus
  5. Gas or vapor deposition

Johannes Voelkl

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Device for treating a substrate

Coating apparatus – Gas or vapor deposition
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Device having a foil-lined crucible for the sublimation...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus
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Method and apparatus for the production of SiC by means of...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Forming from vapor or gaseous state – With decomposition of a precursor
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Method for the sublimation growth of an SiC single crystal,...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Forming from vapor or gaseous state – With decomposition of a precursor
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Process for structuring at least one year as well as...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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