Device for treating a substrate

Details Device for treating a substrate Device for treating a substrate

1997-06-04

2000-11-28

Beck, Shrive

Coating apparatus

Gas or vapor deposition

118724, 118725, 118620, C23C 1600

Patent

active

061530123

ABSTRACT:
A device for treating at least one substrate comprises a susceptor that is thermally coupled to the substrate and an induction-heating device for heating the susceptor. The induction-heating device and the susceptor are so disposed with respect to one another that an electromagnetic force acting on the susceptor is directed parallel to the force of gravity. As a result, a mechanically and thermally stable structure is assured.

REFERENCES:
patent: 3408982 (1968-11-01), Capita
patent: 4858557 (1989-08-01), Pozzetti et al.
patent: 5062386 (1991-11-01), Christensen
patent: 5425812 (1995-06-01), Tsutahara et al.
patent: 5679965 (1997-10-01), Schetzina
patent: 5891251 (1999-04-01), Macleish et al.

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