4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with the removal of material by nonchemical means

Johannes F. Groschopf

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Method of forming a semiconductor arrangement with reduced...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Method of reducing STI divot formation during semiconductor...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
Reexamination Certificate

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Prevention of precipitation defects on copper interconnects...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate

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