4. Radiant energy
  5. Irradiation of objects or material
  6. Ion or electron beam irradiation

Johannes Andreas Henricus Maria Jacobs

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Gas flushing system for use in lithographic apparatus

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
Reexamination Certificate

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Lithographic apparatus, reticle masking device for a...

Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2853085

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