Lithographic apparatus, reticle masking device for a...

Details Lithographic apparatus, reticle masking device for a... Lithographic apparatus, reticle masking device for a...

2007-12-11

2007-12-11

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S067000, C355S075000

Reexamination Certificate

active

11024042

ABSTRACT:
A lithographic apparatus includes a guiding mechanism to guide a movable structure such as a mask blade of a reticle masking device, a movable part connected to the movable structure, and a substantially stationary part to guide the movable part. The movable part includes a nozzle to inject a gas in a gap between the movable and stationary parts, a contactless supply of the gas from the stationary part to the movable part being provided by a gas supply outlet in the stationary part and a gas supply inlet in the movable part. The gas supply outlet includes an inlet trench in a surface of the movable part facing the gas supply outlet of the stationary part, the trench being orientated parallel to a direction of movement of the movable part. The movable part includes a motor drive part and a counter weight part connected to an end of the motor drive part facing away from the movable structure.

REFERENCES:
patent: 6509957 (2003-01-01), Tanaka
patent: 6654100 (2003-11-01), Yoda
patent: 6717296 (2004-04-01), Hol et al.
patent: 7057370 (2006-06-01), Touzov

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